Apparatus for measuring weight of crystal being pulled

Details Apparatus for measuring weight of crystal being pulled Apparatus for measuring weight of crystal being pulled

1996-12-11

1999-03-09

Hiteshew, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117 14, 117201, 117202, C30B 3500

Patent

active

058794514

ABSTRACT:
An apparatus for measuring the weight of a crystal in a cable-type crystal pulling apparatus. A cable winding mechanism of the crystal pulling apparatus includes a guide pulley which is supported by a load plate and which changes the direction of the cable by 180 degrees, and a winding drum 8 which is disposed on a base plate and onto which the cable is wound. The load plate, on which a load due to pulling acts, is supported by a plurality of small-load load cells so that the load is equally distributed to the small-load load cells. Thus, the weight measuring apparatus can have a simple and low-cost structure, and the accuracy of measurement can be improved.

REFERENCES:
patent: 4258003 (1981-03-01), Hurle et al.
patent: 4397813 (1983-08-01), Wahizuka et al.
patent: 4794263 (1988-12-01), Katsuoka et al.
patent: 4916955 (1990-04-01), Katsuoka et al.
patent: 5091043 (1992-02-01), Shirata et al.
patent: 5681758 (1997-10-01), Shinaishi

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