Apparatus for measuring two-dimensional displacement

Details Apparatus for measuring two-dimensional displacement Apparatus for measuring two-dimensional displacement

2007-03-06

2007-03-06

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S521000

Reexamination Certificate

active

10935172

ABSTRACT:
An apparatus for measuring a two-dimensional displacement is disclosed and includes a laser light source, a collimator lens, a beam splitter, a plurality of staggered conjugate optic lens and a plurality of interference optical dephasing modules. The laser light source provides a laser light incident on the collimator lens to generate collimated laser beams. Each of the collimated laser beams are incident on the beam splitter to be separated into two incident beams and incident on a two-dimensional diffraction unit to generate a plurality of first diffracted beams and a plurality of second-order diffracted beams. The staggered conjugate optic lens are used to reflect the first diffracted beams so that the first diffracted beams return to the two-dimensional diffraction unit to generate a plurality of second diffracted beams where the second diffracted beams and the second-order diffracted beams generated as a result of the first diffraction of the beams stagger.

REFERENCES:
patent: 5104225 (1992-04-01), Masreliez
patent: 5204524 (1993-04-01), Ichikawa et al.
patent: 5424833 (1995-06-01), Huber et al.
patent: 5530543 (1996-06-01), Hercher
patent: 6744520 (2004-06-01), Chang et al.
patent: 6771377 (2004-08-01), Jones et al.

Affiliated with

Also associated with

Rating

Apparatus for measuring two-dimensional displacement does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for measuring two-dimensional displacement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for measuring two-dimensional displacement will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3732776