Apparatus for measuring the thickness of thin layers

Details Apparatus for measuring the thickness of thin layers Apparatus for measuring the thickness of thin layers

1986-05-02

1989-01-17

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Fluorescence

378206, G01B 1502

Patent

active

047992468

ABSTRACT:
A deflecting mirror is in the optical path between a monocular microscope for viewing the region of a layer on which an X-ray beam falls, and the region of a layer, the thickness of which is measured according to the X-ray fluroescence principle. The mirror is in an apparatus that has an X-ray beam generator which emits an X-ray beam along a longitudinal geometrical axis, a table device arranged to support the layer, a diaphragm device of a material which absorbs X-rays, having an aperture which is in the longitudinal geometrical axis, and a light source which can be directed onto the region for the layer. The mirror is composed of glass and has a hole at 45.degree. to the plane of the mirror. The longitudinal geometrical axis of the X-ray beam passes through the hole.

REFERENCES:
patent: 4461017 (1984-07-01), Koga et al.
patent: 4521905 (1985-06-01), Hosokawa
patent: 4597093 (1986-06-01), Fischer

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