Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1994-09-12
1995-12-05
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356345, G01B 902
Patent
active
054734320
ABSTRACT:
An apparatus for measuring the thickness of a moving film. The apparatus utilizes a low coherence light source to generate a light signal that is directed at the film with the aid of an optical fiber and lens. A portion of the light reflected from the film is collected and coupled to an interferometer to generate an interference light signal comprising the coherent sum of first and second light signals. The first light signal comprises the collected light signal, and the second light signal comprises the collected light signal offset in time with respect to the first light signal. The offset is varied in time and the interference light signal intensity is measured for the various time offsets. In the preferred embodiment, the numerical aperture of the light focused onto the film may be varied to optimize the light collection for the specific properties of the carriage system used to move the film. The offset is preferably measured by adding a reference light signal with the collected light signal and then detecting the interference pattern generated in the interferometer by the reference light signal.
REFERENCES:
patent: 3319515 (1967-05-01), Flournoy
patent: 5341205 (1994-08-01), McLandrich et al.
R. A. Patten, "Michelson Interferometer as a Remote Gauge", Applied Optics, Dec. 1971, vol. 10, No. 12.
P. A. Flournoy, R. W. McClure, and G. Wyntjes, "White-Light Interferometric Thickness Gauge", Applied Optics, Sep. 1972, vol. 11, No. 9.
Hewlett--Packard Company
Kim Robert
Turner Samuel A.
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