Apparatus for measuring the temperature of a substrate

Details Apparatus for measuring the temperature of a substrate Apparatus for measuring the temperature of a substrate

1994-02-16

1996-07-23

Gutierrez, Diego F. F.

Electric resistance heating devices

Heating devices

Radiant heater

374141, 219411, 340584, 118724, A21B 200, F26B 1900

Patent

active

055398553

ABSTRACT:
A substrate temperature measuring apparatus includes a temperature signal generating device provided in contact with a substrate for generating a signal indicating its own temperature which follows the temperature of the substrate by thermal conduction, a device connected and responsive to the output of the temperature signal generating device for determining whether contact between the substrate and the temperature signal generating device is appropriate or not, and a device for carrying out a predetermined process according to a determination result of the determining device. It is possible to apply heat treatment to the substrate, to prevent the substrate from being subjected to heat treatment, or to give a necessary alarm according to the determination result. Since the next substrate is at room temperature when it first comes into contact with the temperature signal generating device after heat treatment, the temperature signal generating device lowers its temperature rapidly in such a manner that reflects a state of contact between the substrate and the temperature signal generating device. Based on change of the output of the temperature signal generating device at this time, it is possible to detect an undesired state of contact between the substrate and the temperature signal generating device, and to prevent inaccurate measurement of the temperature of the substrate.

REFERENCES:
patent: 5046858 (1991-09-01), Tucker
patent: 5228114 (1993-07-01), Suzuki
patent: 5231690 (1993-07-01), Soma et al.
patent: 5315092 (1994-05-01), Takahashi et al.
patent: 5356486 (1994-10-01), Sugarman et al.

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