Apparatus for measuring the physical properties of a surface...

Details Apparatus for measuring the physical properties of a surface... Apparatus for measuring the physical properties of a surface...

2006-12-12

2006-12-12

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

Reexamination Certificate

active

07148971

ABSTRACT:
The present invention relates to a pattern generating apparatus for writing a pattern on a surface of an object, comprising: a stage having an object having a thickness (T) being provided with a surface, said surface being divided into a number of measurement points, where two adjacent measurement points being spaced a distance apart not exceeding a predetermined maximum distance; means to determine the gradient of the surface at each measurement point; means to calculate a 2-dimensional local offset (d) in the x-y plane for each measurement point as a function of the gradient, and the thickness (T) of object; and means to correct the pattern to be written on said surface by using the 2-dimensional local offset (d). The invention also relates to an apparatus for measuring the physical properties of a surface.

REFERENCES:
patent: 4730927 (1988-03-01), Ototake et al.
patent: 5386294 (1995-01-01), Ototake et al.
patent: 5539521 (1996-07-01), Otokake et al.
patent: 6549271 (2003-04-01), Yasuda et al.
patent: WO 00/72090 (2000-11-01), None

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