Apparatus for measuring the life time of minority carriers of a

Details Apparatus for measuring the life time of minority carriers of a Apparatus for measuring the life time of minority carriers of a

1993-05-12

1995-08-01

Nguyen, Vinh P.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324642, G01R 3126

Patent

active

054382769

ABSTRACT:
An apparatus for measuring the life time of minority carriers includes a light source for irradiating a first region of a semiconductor wafer, a microwave generator for generating microwaves, a transmission line for transmitting a first part of the generated mark raised to the region of the semiconductor wafer that is radiated by the excitation light and a second portion of the generated microwave to a region of the semiconductor wafer that is not radiated by the excitation light. The intensity of the microwave signals reflected from the semiconductor wafer are detected and the life time of the minority carriers is calculated based upon the detected intensities.

REFERENCES:
patent: 3939415 (1976-02-01), Terasawa
patent: 4087745 (1978-05-01), Kennedy et al.
patent: 4704576 (1987-11-01), Tributsch et al.
patent: 5081414 (1992-01-01), Kusama et al.
patent: 5138255 (1992-08-01), Kusama et al.

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