Apparatus for measuring the electrical characteristics of a semi

Details Apparatus for measuring the electrical characteristics of a semi Apparatus for measuring the electrical characteristics of a semi

1990-11-16

1993-01-12

Nguyen, Vinh

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, 437 8, G01R 1900, G01R 3102

Patent

active

051793334

ABSTRACT:
A semiconductor wafer evaluation apparatus, wherein a conductivity detector and a carrier mobility detector are independently arranged so that detections can be made under optimum conditions, respectively. A wafer carrying unit is arranged so as to carry or convey a semiconductor wafer on a carrying path between the two detectors. These components are controlled by a controller. A carrier concentration is calculated from the conductivity and the carrier mobility detected by both detectors. When a partition wall for preventing interference of an electromagnetic wave is provided between the conductivity detector and the carrier mobility detector, interference between the two detectors is further reduced.

REFERENCES:
patent: 3805160 (1974-04-01), Philbrick et al.
patent: 4015203 (1977-03-01), Verkuil
patent: 4190799 (1980-02-01), Miller et al.
patent: 4644172 (1987-02-01), Sandland et al.
patent: 4785232 (1988-11-01), Ballato et al.
patent: 4857839 (1989-08-01), Look et al.
M. C. Chen, "Sensitive contactless eddy-current conductivity measurements on Si and HgCdTe", Review of Scientific Instruments, vol. 60, No. 6, Jun. 1989, pp. 1116-1122.
M. J. Howes, "Direct Reading Mobility Indicator", Review of Scientific instruments, vol. 44, No. 9, Sep. 1973, pp. 1223-1225.

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