Apparatus for measuring the angular distribution of charged part

Details Apparatus for measuring the angular distribution of charged part Apparatus for measuring the angular distribution of charged part

1987-01-28

1988-02-23

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250306, 250396R, H01J 3726

Patent

active

047272503

ABSTRACT:
Apparatus for measuring the angular distribution of charged particles scattered by a sample surface, having a source for the production of a primary particle beam and a deflection system for the deflection of the scattered particles onto the entry orifice of a detector connected to the deflection system, useful, for example, for the study of crystal surfaces by the so-called LEED technique. On the side of the deflection system opposite the sample not only a detector but also a particle source is disposed such that the primary beam also passes through the deflection system. The scannable range of the apparatus for determining the angular distribution of scattered electrons resulting from diffraction is considerably greater than that of the prior art.

REFERENCES:
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patent: 4639602 (1960-01-01), Henzler
Soma, "A Practical Focus-Deflection System for Shaped Electron Beams," Optik., vol. 53, 4, pp. 281-284.
Berger et al., "Preliminary Study for the Construction of the Low Energy Electron Diffraction Apparatus Using a High Tension Source," J. App. Phys., Dec. 77.
Surface Science, vol. 117 (1982), pp. 180-187.
Proc. Eur. Cong. on Electron Microscopy, 1972, "Combined Ultra High Vacuum Electron and Low Energy Diffraction Microscopy."

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