Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Reexamination Certificate
2007-06-26
2007-06-26
Gutierrez, Diego (Department: 2859)
Thermal measuring and testing
Temperature measurement
In spaced noncontact relationship to specimen
C374S121000, C374S141000
Reexamination Certificate
active
10398652
ABSTRACT:
An apparatus (295) using specular reflection spectroscopy to measure a temperature of a substrate (135). By reflecting light (100) from a substrate, the temperature of the substrate can be determined using the band-edge characteristics of the substrate. This in situ apparatus can be used as a feedback control in combination with a variable temperature substrate holder to more accurately control the processing conditions of the substrate. By utilizing a multiplicity of measurement sites, the variation of the temperature across the substrate can also be measured.
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Johnson Shane R.
Johnson Wayne L.
Zhang Yong-Hang
Gutierrez Diego
Jagan Mirellys
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
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