Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1993-10-12
1995-02-21
Wieder, Kenneth A.
Measuring and testing
Surface and cutting edge testing
Roughness
324 7628, G01B 528
Patent
active
053905369
ABSTRACT:
There are provided a pickup for scanning a surface of an object to be measured and for outputting an electric signal corresponding an unfiltered profile curve; and a low-pass filter for extracting low-frequency components corresponding to a waviness profile curve from the electric signal output from the pickup. The low-pass filter comprises two cascade-connected filters expressed by transfer function G(s) having adjusting coefficient .zeta. which ranges from 0.7134 to 1.1083:
REFERENCES:
patent: 3903735 (1975-09-01), Wilson
patent: 4126036 (1978-11-01), Nilan
patent: 4665739 (1987-05-01), Mizuno
DIN 4772, "Electrical Contact (Stylus) Instruments for the Measurement of Surface Roughness by the Profile Method", Nov. 1979, Germany.
DIN 4774, "Measurement of the Depth of Waviness by Means of Electrical Contact (Stylus) Instruments", Jul. 1981, Germany.
Tietze, et al., "Halbleiterschal Tungstechnik", 6th Ed., pp. 376, 377 and 390-398, Jan. 1983, Germany.
Kataoka Masanobu
Zhang Yu-Wu
Mitutoyo Corporation
Solis Jose M.
Wieder Kenneth A.
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