Apparatus for measuring straightness

Details Apparatus for measuring straightness Apparatus for measuring straightness

1992-03-26

1994-07-26

Rosenberger, Richard A.

Optics: measuring and testing

By alignment in lateral direction

With light detector

3561521, G01B 1100

Patent

active

053330536

ABSTRACT:
Straightness is measured with high accuracy through the use of two laser beams of different wavelengths to thereby eliminate any measurement error due to deflection caused by the turbulence of a medium through which the laser beams propagate. An exemplary apparatus for measuring straightness is characterized in that two laser beams of different wavelengths are received by a position sensor, respective measured values including the amounts of deflection created in the two laser beams are sent to a calculating portion, and in the calculating portion, a calculating process of offsetting the amounts of deflection created in the laser beams from the two measured values is carried out to thereby detect the position of a stage and measure straightness.

REFERENCES:
patent: 3813169 (1974-05-01), Kaestner
patent: 3915574 (1975-10-01), Hernquist

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