Apparatus for measuring spatially resolved the luminescence...

Details Apparatus for measuring spatially resolved the luminescence... Apparatus for measuring spatially resolved the luminescence...

2008-11-17

2010-12-14

Evans, F. L (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

C356S244000

Reexamination Certificate

active

07852473

ABSTRACT:
An apparatus to measure spatially resolved the luminescence of a semiconductor sample, in particular a semiconductor wafer or any part thereof, includes a rotatable sample holder for the semiconductor sample. This rotatable sample holder is mounted on an xy stage, and a drive mechanism is used to rotate the sample holder rapidly during the measurement. A device excites luminescence light on the semiconductor sample, and an optical device guides a portion of the luminescence light to a detector. The surface of the semiconductor sample is located in the range of a focal point of the optical device. Using a fixation device, it is possible to remove the rotatable sample holder from the xy stage, when required, and to replace it by a cryostat with an optical window and a further semiconductor sample, so that the surface of the further semiconductor sample is essentially located in the focus point of optical device.

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Hanke et al.: “Femtosecond Quantum Optics with Solid State Nanostructures”, in: Website of the Chair of Modern Optics and Quantum Electronics , University of Konstanz, Germany, Nov. 2007.
Wettling et al.: “Direct and fast Comparison of Near-Infrared Absorption and Photoluminescence Topography of Semiinsulating GaAs Wafers”, in: Appl, Physics, A 40, pp. 191-195, 1986.
Steigmeier et al.: “Light Scattering Topography and Photoluminescence Topography”, in: Appl. Phys. A 50, pp. 531-540, 1990.

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