Apparatus for measuring sheet resistivity of semiconductor mater

Details Apparatus for measuring sheet resistivity of semiconductor mater Apparatus for measuring sheet resistivity of semiconductor mater

1974-10-09

1976-07-20

Corbin, John K.

Electricity: measuring and testing

Conductor identification or location

Inaccessible

324158P, 330 9, 330 30D, G01R 2714

Patent

active

039709230

ABSTRACT:
A device for measuring sheet resistivity of semiconductor materials and diffused layers uses a linear four-point probe having pneumatically-actuated contact pins coupled to a self-zeroing voltage amplifier and a current source having extremely high output resistance.

REFERENCES:
patent: 2954521 (1960-09-01), McKee
patent: 3048776 (1962-08-01), Logan
patent: 3312893 (1967-04-01), Currin et al.
patent: 3801919 (1974-04-01), Wilkes et al.
Till, A. W., "Pneumatic Contact Probe," IBM Tech. Disclosure Bulletin, vol. 13, No. 6, 1970, p. 1551.

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