Apparatus for measuring relative displacement between the appara

Details Apparatus for measuring relative displacement between the appara Apparatus for measuring relative displacement between the appara

1994-09-26

1997-04-15

Gonzalez, Frank

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250237G, G01B 902

Patent

active

056215274

ABSTRACT:
An apparatus for measuring the relative displacement information between it and a scale on which a diffraction grating is formed has a light source, a separating device for separating a light beam from the light source into a plurality of light beams, a wave combining device for wave-combining the diffracted lights of the plurality of light beams separated by the separating device which are diffracted by the diffraction grating, a light receiver for receiving the interfering lights by the plurality of light beams wave-combined by the wave combining device, the relative displacement information between the apparatus and the scale being measured by the light reception of the light receiver, and an optical device adapted to collimate the plurality of light beams or to form a spherical wave having so large a radius of curvature that it can be regarded as a plane wave of the plurality of light beams in the direction of light beam separation of the separating device and to condense the plurality of light beams in the optical path from the separating device to the wave combining device in a direction perpendicular to the direction of light beam separation.

REFERENCES:
patent: 4829342 (1989-05-01), Nishimura
patent: 5283434 (1994-02-01), Ishizuka et al.
patent: 5390022 (1995-02-01), Ishizuka et al.
patent: 5448358 (1995-09-01), Ishizuka et al.
patent: 5481106 (1996-01-01), Nyui et al.
patent: 5483377 (1996-01-01), Kaneda et al.
OPTIK, vol. 85, No. 2, Jul. 1990, Stuttgart De, pp. 47-52. A.G. Sedukhin, "Diffraction Reticles: The Capabilities of Novel Optical Components For Displacement or Distance Measurement".

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