Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1994-12-02
1996-09-03
Gonzalez, Frank
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356401, 250548, G01B 902
Patent
active
055528880
ABSTRACT:
An interferometer used to measure distance to an object is provided with a laser sheath. The sheath encloses a substantial part of the measurement beam's path to provide a controlled environment which reduces environmental influences on the measured distance. The sheath is of variable length and responsive to a follower so as to maintain a sheath end nearest the object at a small distance from the object. An environmental controller controls the environment within the sheath. The environment within the sheath can be a vacuum or a suitable gas or gas mixture. A corrector can be used to compensate the interferometer's measured-distance signal for detected environmental characteristics to produce a corrected signal which indicates distance between the interferometer and the reflective surface. The apparatus and methods can be used to measure and control stage position in a projection-type wafer exposure system which is affected by variations in its atmospheric environment.
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Lee Martin E.
Sogard Michael R.
Gonzalez Frank
Kim Robert
Nikon Precision Inc.
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