Measuring and testing – Gas content of a liquid or a solid
Patent
1989-12-26
1990-11-20
Williams, Hezron E.
Measuring and testing
Gas content of a liquid or a solid
73 2503, G01N 2718
Patent
active
049708910
ABSTRACT:
The apparatus of this invention provides an improved thermal conductivity detector for determination of low levels of gaseous impurities vaporized from solid samples. In particular, a hydrogen impurity vaporized from solid polysilicon beads can be determined down to a detectable limit of about 0.1 ppm by weight. The improvement is comprised of a syringe injection pump for calibration of the instrument, a computer for controlling the syringe infusion pump and for calculating the analytical results, and means for controlling pressure and mass flows of the gas streams.
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Blevins Donald R.
Gaeke, Jr. Gottlieb C.
Grande Doni G.
Sanders Robert N.
Ethyl Corporation
LaRose David E.
Roskos Joseph W.
Williams Hezron E.
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