Apparatus for measuring gap between mask and substrate using...

Details Apparatus for measuring gap between mask and substrate using... Apparatus for measuring gap between mask and substrate using...

2006-03-07

2006-03-07

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C356S614000

Reexamination Certificate

active

07009197

ABSTRACT:
An apparatus for measuring a gap between a mask and a substrate and a method thereof are provided. The apparatus includes a laser displacement sensor, which is placed on a mask and a substrate spaced apart from each other by a predetermined gap, emits laser beams while moving onto the mask and the substrate in a horizontal direction and measures a gap between the mask and the substrate using a variation in distance values measured based on light-receiving positions of the laser beams that are reflected from the mask and the substrate and return to their original positions, respectively.

REFERENCES:
patent: 5239183 (1993-08-01), Kouno et al.
patent: 6649923 (2003-11-01), Matsumoto
patent: P2000-0055698 (2000-09-01), None
patent: P2001-0076131 (2001-08-01), None

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