Apparatus for measuring displacement using first and second dete

Details Apparatus for measuring displacement using first and second dete Apparatus for measuring displacement using first and second dete

1997-02-07

1998-02-10

Font, Frank G.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250237G, G01B 902

Patent

active

057174881

ABSTRACT:
An apparatus for measuring the displacement of an object includes: a diffraction grating arranged on the object, a light source for irradiating a coherence light beam onto the diffraction grating, a first detector for causing two light beams whose phases relatively shift upon linear motion of the object of diffracted light diffracted by the diffraction grating to interfere with each other to detect the interference light beam, and a second detector for causing two light beams whose phases relatively shift upon rotary motion of the object of diffracted light diffracted by the diffraction grating to interfere with each other to detect the interference light beam.

REFERENCES:
patent: 3856401 (1974-12-01), Heitmann et al.
patent: 4975570 (1990-12-01), Nishimura et al.
patent: 5017777 (1991-05-01), Ishizuka et al.
patent: 5142146 (1992-08-01), Morokuma

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