Apparatus for measuring charged particle beam

Details Apparatus for measuring charged particle beam Apparatus for measuring charged particle beam

1982-01-26

1984-06-19

Tokar, Micheal J.

Electricity: measuring and testing

Electrostatic field

324 713, 324 725, 250305, G01R 2912

Patent

active

044555326

ABSTRACT:
The apparatus 11 according to the present invention effectively eliminates losses to reflection and/or secondary emission of the charged particle beam 13 being measured. It comprises a sense cup (17) with an interior chamber and an entry opening (25) through which the charged particle beam (13) enters. A sense cone (19) forms the rear wall of the interior chamber with the cone apex adjacent the entry opening (25). An outer case (21) surrounds the sense cup (17) and is electrically insulated therefrom. Charged particles entering the interior chamber are trapped and are absorbed by the sense cup and cone and travel through a current measuring device (15) to ground.

REFERENCES:
patent: 4251775 (1981-02-01), Michel

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