Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-10-23
2007-10-23
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
10489108
ABSTRACT:
The present invention relates to a non-contact, non-destructive measuring apparatus that measures thickness profile and refractive index distribution of a single or multiple layers of thin films by means of the principle of reflectometry. According to the present invention, by employing more than one narrow band-pass optical filters and a two-dimensional array of CCD sensors, and by finding an optimal solution for the nonlinear functional relationship between the thickness of said thin film or thin films and the corresponding refractive indexes by using an iterative numerical computation method, said apparatus simultaneously measures local area-wise thickness profile and refractive index distribution among others of said a single layer or multiple layers of thin films on a substrate.
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Kim Jin Yong
Kim Yeong Ryeol
Lee Joong Whan
Park Ji Jong
K-MAC
Rothwell Figg Ernst & Manbeck
Turner Samuel A.
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