Apparatus for measuring a temperature of a substrate during a dr

Details Apparatus for measuring a temperature of a substrate during a dr Apparatus for measuring a temperature of a substrate during a dr

1999-07-26

2000-02-22

Wong, Peter S.

Thermal measuring and testing

Temperature measurement

Nonelectrical, nonmagnetic, or nonmechanical temperature...

374 31, 374 43, 374104, 116216, G01K 1100, G01N 2520

Patent

active

060272457

ABSTRACT:
The present invention provides a system for recording a heat exchange event within a drilled hole wall of a substrate during a drilling process. In particular, the invention includes a thermal sensitive film placed in contact with a substrate which is to be drilled, which is capable of recording a thermal signature of the heat transferred during the drilling process. The result is a ring shaped signature whose thickness provides a direct correlation to drilling temperature. With these results, the integrity of the substrate surrounding the drilled hole can be inspected.

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