Apparatus for measuring a layer thickness using transverse waves

Details Apparatus for measuring a layer thickness using transverse waves Apparatus for measuring a layer thickness using transverse waves

1995-07-17

1997-06-03

Williams, Hezrone E.

Measuring and testing

Vibration

By mechanical waves

73622, 73644, 73615, G01N 2910

Patent

active

056356447

ABSTRACT:
An apparatus which measures a thickness of a layer using transverse waves of ultrasonic waves, and includes: a sensor unit having a probe for obliquely transmitting and receiving to and from the surface of a material to be measured having first and second layers with different acoustic impedances in a depth direction: an extractor for extracting, from a wave reception signal representing waves received by the probe, reflected waves from a boundary between the first and the second layers of the material; and a calculator for calculating a distance between the surface of the material and the boundary.

REFERENCES:
patent: 3538752 (1970-11-01), Weinbaum
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patent: 4624127 (1986-11-01), Narushima et al.
patent: 4953405 (1990-09-01), Hara et al.
patent: 4991440 (1991-02-01), Pleinis et al.
patent: 5009103 (1991-04-01), Sato et al.
patent: 5201225 (1993-04-01), Takahashi et al.

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