Apparatus for measuring a diffraction pattern of electron beams

Details Apparatus for measuring a diffraction pattern of electron beams Apparatus for measuring a diffraction pattern of electron beams

1993-04-19

1994-08-09

Berman, Jack I.

Radiant energy

Electron energy analysis

250310, 250397, H01J 37295

Patent

active

053368860

ABSTRACT:
An electron beam emitted from an electron gun is applied to an object whose crystal structure is being examined in a vacuum, and electron beams diffracted by the object are introduced into an energy discriminator of an energy analyzer which discriminates an electron beam or beams having a predetermined energy. The thus discriminated electron beams is converted by an electron beam detector into an electric signal for measuring the diffracted electron beam intensity.

REFERENCES:
patent: 3461306 (1969-08-01), Stout et al.
patent: 4742223 (1988-05-01), Kesmodel
patent: 5148025 (1992-09-01), Ahn et al.
"High-Resolution Low-Energy Electron Diffractometer" by Wendelken et al; Rev. Sec. 29, Instr., vol. 47, No. 9, Sep. 1976, pp. 1069-1078.
"High Sensitivity Low-Energy Electron Diffractometer" by Jenson et al Rev. Sci. Instr., vol. 60, No. 9, Sep./1989, pp. 3065-3067.
"Scanning Electron Diffraction With Energy Analysis" by Denbigh et al, J. Sci. Instr., vol. 42, 1965, pp. 305-311.

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