Apparatus for measurement of the thickness of thin layers

Details Apparatus for measurement of the thickness of thin layers Apparatus for measurement of the thickness of thin layers

2006-07-11

2006-07-11

Glick, Edward J. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Fluorescence

C378S054000

Reexamination Certificate

active

07076021

ABSTRACT:
An apparatus for measurement of the thickness of thin layers by means of X-rays using an X-ray tube which emits X-rays which are directed at a layer to be measured, has at least one aperture apparatus arranged between the X-ray tube and the layer to be measured. The apparatus includes an area absorbing X-rays and an aperture opening. At least one aperture opening in the aperture apparatus has a geometric shape which, seen in the beam direction, projects an area which at least in places is matched to the geometry of the layer to be measured.

REFERENCES:
patent: 4475041 (1984-10-01), Fischer
patent: 4597093 (1986-06-01), Fischer
patent: 5299252 (1994-03-01), Takahashi

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