Apparatus for marking identification symbols on wafer

Details Apparatus for marking identification symbols on wafer Apparatus for marking identification symbols on wafer

1978-05-31

1979-09-04

Cook, Daryl W.

Registers

Systems controlled by data bearing records

29569R, 235464, 235487, 346102, G06K 1700, B01J 1700, G06K 714, G06K 1906

Patent

active

041665740

ABSTRACT:
An apparatus for marking identification symbols on a wafer including: a marking means for marking identification symbols on the wafer; a reading means for reading the marked identification symbols; a comparing means for comparing data of the identification symbols which are read by the reading means with basic data on which the identification symbols are marked on the wafer, and a judging means for inspecting and judging from a result of the comparison whether the desired identification symbols are marked on the wafer or not.

REFERENCES:
patent: 3600556 (1971-08-01), Acker
patent: 3700859 (1972-10-01), Laurer et al.
patent: 3935427 (1976-01-01), Geul
patent: 3991883 (1976-11-01), Hobler et al.
patent: 4095095 (1978-06-01), Muraoka et al.

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