Apparatus for manufacturing ultrapure water

Distillation: apparatus – Apparatus – Systems

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Details

202202, 159DIG6, 203 3, 203 10, 203 31, 203 38, 203 41, 203DIG16, 210748, 210758, 210759, 210760, 210900, C02F 104, C02F 132

Patent

active

054683505

ABSTRACT:
The apparatus includes a container for accommodating water to be treated and evaporating the water. Container is attached with water supply for supplying the water to be treated into the container. The water to be treated in container is heated by a heater. Vapor evaporated from the inside of container is cooled by a cooler. Distilled water output from cooler is irradiated with ultraviolet light by a ultraviolet light irradiator. An organic decomposed substance contained in the distilled water irradiated with the ultraviolet light is removed by organic decomposed substance removal device, and ultrapure water is obtained.

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