Apparatus for manufacturing single crystals

Chemical apparatus and process disinfecting – deodorizing – preser – Control element responsive to a sensed operating condition – Control element responds proportionally to a variable signal...

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422249, C30B 1528

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active

043978134

ABSTRACT:
The invention provides a method and an apparatus for manufacturing single crystals wherein the weight of the single crystal pulled is measured by a weight detector. The measured weight is compared with a reference weight signal which is generated from a reference weight signal generator. A weight deviation signal representing a difference between these two signals is generated by a weight deviation detector. The weight deviation signal is differentiated by a first differentiation circuit and a differentiation output signal obtained is corrected for compensation for the buoyancy of the liquid encapsulant by a signal which is generated by a buoyancy correction signal generator. A corrected signal thus obtained is differentiated by a second differentiation circuit and is thereafter added to the corrected signal. The addition result is phase-compensated by a phase-compensating circuit. The phase-compensated signal is supplied to a heating control circuit. At the same time, the heating control circuit generates a heating control signal to a heating device in response to a program signal which is generated from a program signal generator. In response to the output signal from the heating device, a heater which controls the temperature of the melt held in a vessel and which is arranged outside the vessel is heated according to the program.

REFERENCES:
patent: 3934983 (1976-01-01), Bardsley et al.
patent: 4258003 (1981-03-01), Hurle et al.
J. Electrochem Soc. Solid State Science vol. 118 No. 2, pp. 306-312 2/71.
Inst. Phys. Conf. Ser. No. 24 (1975) p. 355; W. Bardsley et al. "Automated Czochralski Growth of III-V Compounds".

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