Apparatus for manufacturing silicon single crystals

Details Apparatus for manufacturing silicon single crystals Apparatus for manufacturing silicon single crystals

1990-06-19

1991-04-23

Straub, Gary P.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

1566171, 156DIG83, 156DIG115, C30B 3500, C30B 1512

Patent

active

050098632

ABSTRACT:
A silicon single crystal manufacturing apparatus in which a partition member formed with at least one small hole through its lower part is arranged in a rotating quartz crucible so as to surround a large cylindrical silicon single crystal which is rotated and pulled. The whole or part of the partition member is made from cellular silica glass whose cell content (volume percentage) is between 0.01 and 15% or less than 0.01% but increased to 0.01 through 15% by the heat used for melting starting silicon material. Thus, the molten material contacting with the inside of the partition member is prevented from decreasing in temperature and solidification of the molten material from this portion is prevented.

REFERENCES:
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patent: 4015048 (1977-03-01), Martin
patent: 4042361 (1977-08-01), Bihuniak et al.
patent: 4200445 (1980-04-01), Bihoniak et al.
patent: 4238274 (1980-12-01), Chu et al.
patent: 4528163 (1985-07-01), Albecht
patent: 4911896 (1990-03-01), Bihuniak et al.
Lin et al., Ann. Rev. Mater. Sci. 17, 273-298 (1987), Palo Alto, CA.

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