Apparatus for manufacturing silicon single crystals

Details Apparatus for manufacturing silicon single crystals Apparatus for manufacturing silicon single crystals

1991-06-27

1992-09-01

Kunemund, Robert

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

1566171, 1566181, 1566204, 156DIG64, 422249, 422250, B01D 900

Patent

active

051437040

ABSTRACT:
In a silicon single crystal manufacturing apparatus of the type which continuously feeds starting material, a metallic heat keeping plate is arranged to cover a partition member dividing molten silicon into a single crystal growing section and a material melting section within a quartz crucible and an upper side of the material melting section. The metallic heat keeping plate is provided for the purpose of preventing the occurrence of solidification of the molten silicon on the inner side of the partition member and preventing excessive cooling of a silicon single crystal. The metallic heat keeping plate has a thickness of 3 mm or less and its material is tantalum or molybdenum. Further, the heat keeping plate includes a straight body portion formed with a plurality of openings for adjusting the temperature of the single crystal.

REFERENCES:
patent: 4330362 (1982-05-01), Zulehner

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