Apparatus for manufacturing semiconductor single crystal

Details Apparatus for manufacturing semiconductor single crystal Apparatus for manufacturing semiconductor single crystal

1984-01-16

1986-08-12

Envall, Jr., Roy N.

Industrial electric heating furnaces

Plural diverse heating means

Resistance

373109, 373117, 373128, H05B 1100

Patent

active

046060375

ABSTRACT:
The heater member of a furnace for heating the crucible used for fusing raw materials for a semiconductor single crystal is provided with reinforcing members made of a material such as alumina or pyrolytic boron nitride which excels in electric insulating property, resistance to heat, and strength. When a magnetic field with an alternating current or pulsating current of electricity is applied to the site of single crystal growth for the purpose of stabilizing the growth of the single crystal, the furnace tends to sustain breakage. These reinforcing members thus used on the heater member impart improved durability to the furnace and enable the apparatus as a whole to enjoy a long service life.

REFERENCES:
patent: 3057936 (1962-10-01), Hill
patent: 3257492 (1966-06-01), Westeren
patent: 3359077 (1967-12-01), Arst
patent: 4410796 (1983-10-01), Wilsey

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