Apparatus for manufacturing multi-layered semiconductor elements

Details Apparatus for manufacturing multi-layered semiconductor elements Apparatus for manufacturing multi-layered semiconductor elements

1979-03-23

1981-03-31

Lawrence, Evan K.

Coating apparatus

With means to centrifuge work

427 87, 427241, B05C 304, B05C 3109

Patent

active

042586470

ABSTRACT:
In a crucible or reactor for making multi-layered semiconductor devices by means of liquid-phase epitaxy, different supersaturated solutions are brought into contact with semiconductor substrates for short times. Transport of the solutions occurs by alternating acceleration. Either gravity alternates with centrifugal force, or a positive rotational acceleration alternates with a negative one. Chambers within the reactor are interconnected by channels so that the alternating forces acting upon the solutions cause these to flow in a preferred direction without mixing with each other.

REFERENCES:
patent: 450391 (1891-04-01), Wahlin
patent: 3974797 (1976-08-01), Hutson
patent: 4101925 (1978-07-01), Kelley et al.
Grant, J., Hackh's Chemical Dictionary, 4th edition, New York, McGraw-Hill Book Company, 1972, p. 562.

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