Liquid crystal cells – elements and systems – Nominal manufacturing methods or post manufacturing... – Injecting liquid crystal
Reexamination Certificate
2005-06-10
2008-03-04
Qi, Mike (Department: 2871)
Liquid crystal cells, elements and systems
Nominal manufacturing methods or post manufacturing...
Injecting liquid crystal
C349S187000, C349S042000
Reexamination Certificate
active
07339648
ABSTRACT:
An apparatus for forming a thin film on a substrate includes a chamber having a gas inlet, an upper electrode in the chamber, the upper electrode having a plurality of nozzles, a lower electrode in the chamber for supporting the substrate thereon, the lower electrode being spaced apart from the upper electrode, and a selective injection plate above the upper electrode, the selective injection plate including a selective injection valve for selectively concentrating a gas supplied through the gas inlet onto a portion of the upper electrode.
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patent: 5-55172 (1993-03-01), None
Jeon Dae-Jin
Yang Jae-Ho
LG.Philips LCD Co. Ltd
McKenna Long & Aldridge LLP
Qi Mike
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