Apparatus for manufacturing liquid crystal display device...

Liquid crystal cells – elements and systems – Nominal manufacturing methods or post manufacturing... – Injecting liquid crystal

Reexamination Certificate

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C349S187000, C349S042000

Reexamination Certificate

active

07339648

ABSTRACT:
An apparatus for forming a thin film on a substrate includes a chamber having a gas inlet, an upper electrode in the chamber, the upper electrode having a plurality of nozzles, a lower electrode in the chamber for supporting the substrate thereon, the lower electrode being spaced apart from the upper electrode, and a selective injection plate above the upper electrode, the selective injection plate including a selective injection valve for selectively concentrating a gas supplied through the gas inlet onto a portion of the upper electrode.

REFERENCES:
patent: 6179920 (2001-01-01), Tarutani et al.
patent: 6383896 (2002-05-01), Kirimura et al.
patent: 6417111 (2002-07-01), Nishikawa et al.
patent: 6905079 (2005-06-01), Kuwada et al.
patent: 7138336 (2006-11-01), Lee et al.
patent: 2005/0156063 (2005-07-01), Tsuji et al.
patent: 5-55172 (1993-03-01), None

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