Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – With means applying electromagnetic wave energy or...
Reexamination Certificate
2001-04-20
2003-04-29
Nguyen, Nam (Department: 1741)
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
With means applying electromagnetic wave energy or...
C422S186110, C422S186200, C204S275100
Reexamination Certificate
active
06555072
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to a manufacturing method of high concentration ozone gas and an apparatus thereof using a pressure swing adsorption apparatus (PSA apparatus) having plural adsorbing layers filled with a specific high silica ozone adsorbent large in the difference of ozone adsorbing amount between adsorption pressure and desorption pressure, that is, the ozone adsorbing capability.
The invention also relates to a manufacturing method of high concentration ozone gas and an apparatus thereof for concentrating ozone by a temperature swing adsorption system for changing over an ozone adsorbing process at a relatively low temperature and an ozone recovery process at a relatively high temperature, by using a specific ozone adsorbent having a high ozone adsorbing capability even in the presence of water.
Ozone is produced by using silent discharge apparatus or water electrolytic apparatus, but the ozone gas obtained from these apparatuses are low in concentration, and it is usually used after concentrating by an ozone adsorbing apparatus or the like.
As an ozone concentrating apparatus, an oxygen recycling ozone generating apparatus using liquid oxygen is proposed (Japanese Patent Application Laid-open No. 53-64690). A schematic diagram of this apparatus is shown in FIG.
15
. It is a feature of this apparatus that liquid oxygen is used as the oxygen material. This liquid oxygen
31
is fed into an ozone generating apparatus
32
, and the gas containing the ozone is cooled to about −60° C. by a heat exchanger
33
and a refrigerating machine
34
, it is further fed into an ozone adsorbing tower
35
filled with silica gel to adsorb ozone, the gas containing oxygen flowing out from the adsorbing tower
35
is fed into the heat exchanger
33
to cool the gas containing the ozone, and it is returned to the material side of the ozone generating apparatus
32
. On the other hand, the adsorbing tower
35
having adsorbed the ozone is transferred to the desorbing process, and the air
37
dried by a dryer
36
is heated by a heat exchanger
38
, and is fed into the ozone adsorbing tower
35
to be heated, purged and desorbed, and a concentrated ozone gas
37
is recovered, while the desorbed concentrated ozone gas
39
is fed into the heat exchanger
38
, and the dried air is heated. Consequently, the regenerated adsorbing tower
35
by desorbing the ozone is transferred from the desorbing process to the adsorbing process.
Thus, the silica gel is known as ozone adsorbent, but since it is extremely large in the moisture adsorbing capability as compared with ozone, if moisture is present in the gas contacting with the adsorbent (the gas to be treated, purge gas, and the like), the moisture is preferentially adsorbed by the silica gel, and it is hard to desorb the once adsorbed moisture, and the moisture is accumulated, and hence it is difficult to maintain a specific ozone adsorbing capability. As a result, an extremely large amount of silica gel is needed for maintaining a specific gas treating capacity, and the adsorbing apparatus itself is increased in its size. Besides, when adsorption and desorption of moisture are repeated, the silica gel is powdered and may be lowered in the adsorbing capability.
In the aforesaid apparatus, using liquid oxygen as oxygen material, by preliminarily drying the purge gas and feeding into the adsorbing tower, moisture is prevented from mixing into the adsorbing tower filled with silica gel, and the ozone adsorbing amount is increased by utilizing the low temperature of the liquid oxygen.
Generally, the ozone adsorbing amount is larger as the temperature is lower, but it is hard to cool lower than −60° C. unless a particular refrigerating machine is used, and a large amount of adsorbent is usually required for increasing the treated gas amount, and the apparatus becomes larger in size, which causes to increase the manufacturing cost and running cost of the apparatus.
SUMMARY OF THE INVENTION
It is hence an object of the invention to solve the above problems, and provide a method and apparatus for manufacturing high concentration ozone gas capable of concentrating ozone efficiently, by using a specific high silica ozone adsorbent excellent in ozone adsorbing capability even in the presence of moisture, and applying this adsorbent in a pressure swing adsorbing apparatus or a temperature swing adsorbing apparatus. Moreover, by combining a specific ozone generating apparatus and the pressure swing adsorbing apparatus or temperature swing adsorbing apparatus, it is also intended to provide a method and apparatus for manufacturing high concentration ozone further excellent in the ozone concentrating efficiency.
Invention of First Group
The invention of a first group succeeded in solving the above problems by employing the following constitution.
(1) A manufacturing method of high concentration ozone gas, characterized by employing a pressure swing adsorbing apparatus having a plurality of adsorbing layers filled with ozone adsorbent, adsorbing ozone by feeding gas containing ozone at a relatively high pressure into the adsorbing layers in the adsorbing process, and recovering concentrated ozone gas by setting the adsorbing layers of the desorbing process to a relatively low pressure, in which the ozone adsorbent is an adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate.
(2) A manufacturing method of high concentration ozone gas according to (1), in which the high silica pentasyl zeolite has the SiO
2
/Al
2
O
3
ratio of 70 or more, preferably 100 or more, dealuminized fogersite has the SiO
2
/Al
2
O
3
ratio of 20 or more, preferably 50 or more, and mesoporous silicate has the SiO
2
/Al
2
O
3
ratio of 20 or more, preferably 50 or more.
(3) A manufacturing method of high concentration ozone gas according to (1) or (2), in which the adsorbing layers in the adsorbing process are held at temperature of −60° C. to 25° C.
(4) A manufacturing method of high concentration ozone gas according to any one of (1) to (3), in which the adsorbing pressure in the adsorbing process is selected in a range of 1.05 to 5 atm, and the desorbing pressure of the desorbing process is selected in a range of 0.04 to 0.3 atm.
(5) A manufacturing method of high concentration ozone gas according to any one of (1) to (4), in which the changeover time of the pressure swing adsorbing apparatus is selected in a range of 1 to 10 minutes.
(6) A manufacturing method of high concentration ozone gas according to any one of (1) to (5), in which part of the high pressure oxygen concentrated gas flowing out from the adsorbing layers in the adsorbing process is decompressed by a reducing valve, and is fed into the adsorbing layers in the desorbing process to be purged.
(7) A manufacturing method of high concentration ozone gas according to (6), in which the purge rate in the purge operation is selected in a range of 1 to 2.
(8) A manufacturing method of high concentration ozone gas according to any one of (1) to (7), in which ozone is generated by using a water electrolytic ozone generating apparatus of high pressure, the gas containing ozone is fed into the adsorbing layers in the adsorbing process of the pressure swing adsorbing apparatus, and part of the high pressure oxygen concentrated gas flowing out from the adsorbing layers in the adsorbing process is returned to the hydrogen electrode chamber of the water electrolytic ozone generating apparatus to depolarize the oxygen.
(9) A manufacturing method of high concentration ozone gas according to any one of (1) to (7), in which ozone is generated by using a silent discharge ozone generating apparatus of high pressure specification, the gas containing ozone is fed into the adsorbing layers in the adsorbing process of the pressure swing adsorbing apparatus, and part of the high pressure oxygen concentrated gas flowing out from the adsorbing layers in the adsorbing process is returned to the material side of the silent dis
Izumi Jun
Tomonaga Nariyuki
Tsutaya Hiroyuki
Yasutake Akinori
Anderson Kill & Olick
Lieberstein Eugene
Meller Michael N.
Mitsubishi Heavy Industries Limited
Nicolas Wesley A.
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