Apparatus for manufacturing flat panel display devices

Details Apparatus for manufacturing flat panel display devices Apparatus for manufacturing flat panel display devices

2007-03-20

2007-03-20

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

Crystal or gem examination

C356S121000, C219S121730

Reexamination Certificate

active

10991482

ABSTRACT:
A mechanism for always measuring the spatial intensity distribution of a laser beam and displacement of the optical axis of the laser beam is provided so that a measured signal is processed when the laser beam incident on a laser beam shaping optical element is out of a predetermined condition. The shape, diameter and incidence position of the laser beam incident on the laser beam shaping optical element are always kept in the predetermined condition by a spatial filter disposed at the position of a focal point of lenses forming a beam expander disposed in the optical axis, on the basis of a result of the signal processing.In this manner, silicon thin films uniform in crystallinity can be formed stably with a high yield on an insulating substrate which forms display panels of flat panel display devices.

REFERENCES:
patent: 6632711 (2003-10-01), Sugano et al.
patent: 6693258 (2004-02-01), Sugano et al.
patent: 2005/0169330 (2005-08-01), Hongo et al.
patent: 11-283933 (1999-10-01), None
patent: 2002-231958 (2002-08-01), None
patent: 2003-053578 (2003-02-01), None
patent: 2003-124136 (2003-04-01), None
patent: 2004-165598 (2004-06-01), None

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