Apparatus for manufacturing electron source and image forming ap

Electric lamp or space discharge component or device manufacturi – Process – With testing or adjusting

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445 6, 445 51, H01J 902, H01J 942

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055910610

ABSTRACT:
An electron-emitting device has a pair of device electrodes and an electroconductive thin film including an electron emitting region arranged between the electrodes. The device is manufactured via an activation process for increasing the emission current of the device. The activation process includes steps of a) applying a voltage (Vact) to the electroconductive thin film having a gap section under initial conditions, b) detecting the electric performance of the electroconductive thin film and c) modifying, if necessary, the initial conditions as a function of the detected electric performance of the electroconductive thin film.

REFERENCES:
M. Hartwell, et al., "Strong Electron Emission From Patterned Tin-Indium Oxide Thin Films," Int. Electron Devices Meeting, 1975, pp. 519-521.
M. Elinson, et al., "The Emission of Hot Electrons and The Field Emission of Electrons from Tin Oxide," Radio Engineering and Electronic Physics, 1965, pp. 1290-1296.
H. Araki, et al., "Electroforming and Electron Emission of Carbon Thin Films," J. Vac. Soc. Japan, vol. 26, 1983, pp. 22-29.
G. Dittmer, "Electrical Conduction and Electron Emission of Discontinuous Thin Films," Thin Solid Films, 9 (1972) pp. 317-328.
C. A. Spindt, et al., "Physical Properties of Thin-Film Field Emission Cathodes with Molybdenum Cones," J. Appl. Phys., vol. 47, (1976), pp. 5248-5263.
C. A. Mead, "Operation of Tunnel-Emission Devices," J. Appl. Phys., 32, pp. 646-652.
Dyke and Dolan, "Field Emission," Advances in Electronics and Electron Physics, vol. VIII, (1956), pp. 90-185.
"The Experimental Physics Course No. 14: Surface/Fine Particle" (ed. Koreo Kinoshita; Kyoritu Publication, Sep. 1, 1986).
"Ultrafine Particle--Creative Science and Technology", ed. Chikara Hayashi, Ryoji Ueda, Akira Tazaki; Mita Publication, 1988, p. 2.

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