Coating processes – Direct application of electrical – magnetic – wave – or... – Electromagnetic or particulate radiation utilized
Patent
1996-10-09
2000-05-16
Bueker, Richard
Coating processes
Direct application of electrical, magnetic, wave, or...
Electromagnetic or particulate radiation utilized
427249, 118726, 118730, C23C 1400
Patent
active
060634553
ABSTRACT:
The present invention relates to an apparatus for manufacturing a diamond film having a large area which is used for a field emission display (FED) and a manufacturing method thereof.
The apparatus for manufacturing a diamond film having a large area according to the present invention comprises a pulse laser generating system for generating a pulse laser beam, a laser beam scanner for scanning said pulse laser beam, and a vacuum chamber which includes a target and a substrate holder, wherein said laser beam having passed said laser beam scanner is irradiated on said target, and wherein a substrate on which a diamond film is to be formed by a plume produced from said target is set up to said substrate holder. The diamond film according to the present invention has a uniform electrical and mechanical properties and can be obtained in a short time period and with a uniform width and a large area. The diamond film manufactured according to the present invention can be also used for manufacturing emitters for FED having a large area and can increase the efficiency of the target because of the possibility of using the overall area thereof.
REFERENCES:
patent: 4987007 (1991-01-01), Wagel
patent: 5622567 (1997-04-01), Kojima
patent: 5693146 (1997-12-01), Nakanishi
Marquardt, Mat. Res. Soc. Symp. Proc., vol. 38, pp. 325-335, 1985.
Choi Jung Ok
Jeong Hyo Soo
Kim Han
Kim Moung Jae
Bueker Richard
Institute for Advanced Engineering
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