Apparatus for manufacturing compound semiconductor single crysta

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Including specific material of construction

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156607, 156617SP, 156DIG83, C30B 2702

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active

046860916

ABSTRACT:
An apparatus has a crucible for containing a GaAs raw material melt and a B.sub.2 O.sub.3 liquid encapsulating material therein, a heat generator arranged around the crucible so as to be coaxial therewith, and a heat insulator assembly arranged around the heat generator to surround the heat generator and the crucible for the purpose of manufacturing a compound semiconductor single crystal by pulling it from the raw material melt in the crucible by the LEC method. In the heat insulator assembly of the apparatus of the above construction, an upper heat insulator, arranged above the crucible and having at its center a circular hole for receiving the single crystal being pulled, comprises a plurality of radially divided sector-shaped split members. The split members are sintered bodies having aluminum nitride (AlN) as a major constituent.

REFERENCES:
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patent: 92511 (1869-07-01), Baxter
patent: 1370113 (1921-03-01), Janusonis
patent: 3511610 (1970-05-01), Dohmen
patent: 3715194 (1973-02-01), Plooster
patent: 4478675 (1984-10-01), Akai
patent: 4540673 (1985-09-01), Takeda et al.

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