Apparatus for manufacturing chalcopyrite film

Details Apparatus for manufacturing chalcopyrite film Apparatus for manufacturing chalcopyrite film

1997-02-04

1998-03-10

Bueker, Richard

Coating apparatus

Control means responsive to a randomly occurring sensed...

Condition of coated material

118710, 118712, 118715, C23O 1600

Patent

active

057256713

ABSTRACT:
An apparatus for manufacturing an ABC.sub.2 chalcopyrite film (wherein A represents Cu or Ag, B represents In, Ga or Al, C represents S, Se or Te) includes a substrate holder, a substrate heater, a supply source for supplying elements A, B or C onto the substrate and for controlling the supply process, and a monitor for monitoring an electrical or optical property of the thin film layer deposited on the substrate. The electrical or optical property of the thin film layer abruptly changes at a first time point when the A/B ratio in the thin film layer changes from an element A-excessive state to the stoichiometric composition ratio of the ABC.sub.2. The electrical or optical property of the thin film layer demonstrates a stable value at a second time point when the A/B ratio becomes an element-B excessive state. Deposition is terminated at the second time point.

REFERENCES:
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patent: 4543576 (1985-09-01), Hieber et al.
patent: 4783373 (1988-11-01), Baumeister et al.
patent: 5151295 (1992-09-01), Kawahara et al.
patent: 5200021 (1993-04-01), Kawai et al.
patent: 5241366 (1993-08-01), Bevis et al.
patent: 5260772 (1993-11-01), Pollak et al.
patent: 5403433 (1995-04-01), Morrison et al.
R.A. Mickelsen et al.; "Development of Thin-Film CulnSe.sub.2 Solar Cells", ICTMC7; High Technology Center; 1986, pp. 39-47.

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