Apparatus for manufacturing carbon nanotubes

Details Apparatus for manufacturing carbon nanotubes Apparatus for manufacturing carbon nanotubes

2006-07-26

2009-08-11

Griffin, Walter D (Department: 1797)

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

C422S150000, C422S151000, C422S152000, C422S198000, C422S199000, C422S232000, C423S447200, C423S447300

Reexamination Certificate

active

07572413

ABSTRACT:
An apparatus for manufacturing carbon nanotubes is provided. The apparatus includes: a reaction chamber having an inlet and a outlet; a heater for elevating an interior temperature of the reaction chamber; and a gas guiding member coupled to the inlet and configured for introducing a carbon-containing gas into the reaction chamber, the gas guiding member including a gas-exiting portion arranged in the reaction chamber, the gas-exiting portion having a cavity defined therein and a flat perforated top wall, the perforated top wall being configured for supporting a substrate thereon and defining a route allowing the introduced carbon-containing gas to flow in a direction substantially perpendicular to a main plane of the substrate.

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