Apparatus for manufacturing a compound-semiconductor single crys

Details Apparatus for manufacturing a compound-semiconductor single crys Apparatus for manufacturing a compound-semiconductor single crys

1985-03-04

1987-05-26

Lacey, David L.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

422240, 156617SP, 156607, 156DIG83, 373156, 373163, 432264, 432265, C30B 1510

Patent

active

046684816

ABSTRACT:
A compound-semiconductor single-crystal-manufacturing apparatus comprises a crucible for holding a molten raw material of GaAs and a liquid capsule element of B.sub.2 O.sub.3, a crucible holder, a heat element concentrically surrounding the crucible, and a heat-shielding unit surrounding the heat element, for use in manufacturing a GaAs single crystal by progressively pulling it up from the raw molten material held in the crucible by the liquid encapsulated Czochralski (LEC) process. The heat-shielding unit and crucible holder are formed by molding a sintered aluminum nitride (AlN) element.

REFERENCES:
patent: 4196171 (1980-04-01), Watanabe et al.
patent: 4235848 (1980-11-01), Sokolov et al.
patent: 4478675 (1984-10-01), Akai
patent: 4519966 (1985-05-01), Aldinger et al.

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