Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2006-01-31
2006-01-31
King, Roy (Department: 1742)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C118S729000, C118S500000, C134S902000, C156S345510, C204S212000, C204S22400M, C204S22400M, C204S269000, C414S222130, C414S935000
Reexamination Certificate
active
06991710
ABSTRACT:
A method and apparatus for manually and automatically processing microelectronic workpieces. The apparatus can include a tool having a plurality of processing stations, all of which are manually accessible to a user, and an input/output station configured to support at least one microelectronic workpiece for automatic transfer to and from the processing stations. A transfer device is positioned proximate to the input/output station and the processing stations and is configured to automatically transfer microelectronic workpieces between the input/output station and the processing stations. The apparatus can be used for both manual and automatic processing of microelectronic workpieces, either sequentially or simultaneously.
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Magnum, “The perfect partnership of process excellence and produc
Harris Randy
Woodruff Daniel J.
King Roy
Leader William T.
Perkins Coie LLP
Semitool Inc.
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