Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1988-12-07
1992-02-25
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, 2503153, G01R 3126, H01L 3100
Patent
active
050916912
ABSTRACT:
An apparatus for making ac surface photovoltage (SPV) measurements of a specimen of semiconductor material under dc bias voltage conditions includes a light source whose output beam is intensity modulated, an adjustable dc bias voltage source, a conductive base for supporting the specimen and a novel capacitance type reference electrode assembly for sensing the SPV signals. The reference electrode assembly includes in one embodiment a button made of insulating elastomeric material and attached to a rigid plate made of insulating material. A film made of insulating material and having a conductive coating on one side which serves as a reference electrode is attached to the button. When SPV measurements are being taken, the film is pressed against the specimen with pressure sufficient to hold the reference electrode in close compliance with the specimen, with pressure being applied to the plate from an external source and being transmitted from the rigid plate to the film through the elastomeric button.
REFERENCES:
patent: 4286215 (1981-08-01), Miller
patent: 4333051 (1982-06-01), Goodman
patent: 4433288 (1984-02-01), Moore
patent: 4544887 (1985-10-01), Kamieniecki
patent: 4551674 (1985-11-01), Miller
patent: 4663526 (1987-05-01), Kamieniecki
Goldfarb William C.
Kamieniecki Emil
Wollowitz Michael
Eisenzopf Reinhard J.
Kriegsman Irving M.
Nguyen Vinh P.
Semitest Inc.
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