Apparatus for making semiconductor devices

Details Apparatus for making semiconductor devices Apparatus for making semiconductor devices

1979-10-12

1982-07-13

McIntosh, John P.

Coating apparatus

Immersion or work-confined pool type

With means to move tank or pool

118425, 118429, B05C 309

Patent

active

043388779

ABSTRACT:
An apparatus for making semiconductor devices comprising a block having a slot hole for holding a semiconductor substrate therein, a solution container which has a predetermined number of holes to contain semiconductor solutions therein and is slidably disposed on said block, characterized in that said slot hole has walls having a considerable angle with respect to a horizontal plane and has a solution inlet at the top part of said slot hole and a solution outlet at the bottom part of said slot hole, and has a means to hold said substrate with its principal face substantially parallel to said walls.

REFERENCES:
patent: 3753801 (1973-08-01), Lockwood et al.
patent: 3759759 (1973-09-01), Solomon
patent: 3879235 (1975-04-01), Gatos et al.
patent: 4123302 (1978-10-01), Marinelli
"Apparatus for Continuous Liquid Phase Epitaxy Growth", Blum et al., IBM Technical Disclosure Bulitia, vol. 15, No. 8, Jan. 1973.

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