Apparatus for making laminated integrated circuit devices

Details Apparatus for making laminated integrated circuit devices Apparatus for making laminated integrated circuit devices

1996-05-29

1999-04-06

Walberg, Teresa

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219385, 219393, 156288, 264263, F27B 506, F27D 500, H05B 322

Patent

active

058922032

ABSTRACT:
An apparatus for producing laminated integrated circuit cubes includes a hermetically sealable oven chamber. At least one conductive heating device is used to heat the cube to a cure temperature. A vacuum source is connected to the oven chamber to remove gas from between the integrated circuit layers prior to curing. A press device applies pressure to the cube while it is heated under vacuum. A cooling gas is circulated through the oven chamber after curing. A cooling fluid can also be circulated through cooling channels in at least one wall of the oven chamber to cool the chamber.

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