Apparatus for low-temperature plasma treatment of sheet material

Details Apparatus for low-temperature plasma treatment of sheet material Apparatus for low-temperature plasma treatment of sheet material

1987-07-10

1989-05-09

Fields, Carolyn E.

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

2504921, 2504531, 118718, 118 501, G21K 502

Patent

active

048291897

ABSTRACT:
An apparatus for low-temperature plasma treatment of a sheet material, comprising a plurality of reaction zones through which the sheet material is transported in an enclosed reaction chamber whose inner pressure can be reduced, in which the reaction zones are provided respectively with an electrode communicating to a high frequency generating device and a plurality of jet nozzles for supplying a gas thereto for generating low-temperature plasma gas, and the reaction chamber and the reaction zones are earthed. Another apparatus for the same purpose is to provide a liquid medium passage passing through the guide rolls for transporting a sheet material to be treated and through the electrodes under reduced pressure for heating or cooling the sheet material under treatment to a prescribed temperature. Further an electric energy feeding device for the electrodes comprising a shielded wire jointer having a cooling mechanism for connecting a shielded wire coming out of a high frequency generating device to the electrodes for generating low-temperature plasma.

REFERENCES:
patent: 3924563 (1975-12-01), Kessler et al.
patent: 4437324 (1984-03-01), Sando et al.
patent: 4457145 (1984-07-01), Sando et al.
patent: 4601260 (1986-07-01), Ovshinsky
patent: 4619667 (1986-10-01), Ueno et al.
patent: 4649860 (1987-03-01), Furukawa et al.
patent: 4691137 (1987-09-01), Goto et al.

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