Apparatus for low temperature ashing using radio frequency excit

Details Apparatus for low temperature ashing using radio frequency excit Apparatus for low temperature ashing using radio frequency excit

1976-03-11

1977-04-12

Edmundson, F.C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

23230PC, 23253PC, 204164, 250541, B01K 100, G01N 2700

Patent

active

040174042

ABSTRACT:
An apparatus for low temperature ashing of specimens is provided. The specimens to be ashed are first freeze dried and then reduced to an ash by a radio frequency (RF) excited gas plasma in a device which includes a reaction chamber, means to reduce the pressure in the chamber, means communicating with the chamber for supplying a stream of reaction gas thereto, and an RF means including a driven and receiver antenna pair with an annular antenna around the chamber and a planer antenna associated with the end wall of the chamber.

REFERENCES:
patent: 2664394 (1953-12-01), Reeves
patent: 3671195 (1972-06-01), Bersin
patent: 3720589 (1973-03-01), Thompson
patent: 3738828 (1973-06-01), Inoue
patent: 3861137 (1975-01-01), Russell et al.

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