Apparatus for locking movable table

Details Apparatus for locking movable table Apparatus for locking movable table

1987-02-05

1988-10-18

Friedman, Carl D.

Supports

Machinery support

Base or platform

108137, F16M 100

Patent

active

047781432

ABSTRACT:
An apparatus for locking a movable stage onto a stationary base, the stage being moved in the state floating above the base. The apparatus comprises a cap-like vacuum suction plate fixedly combined with the stage and defining a space in cooperation with the stationary base, wherein the space is selectively connected either to an air supply source or to a vacuum source. To move the stage in the floating stage, the space defined below the vacuum suction plate is connected to the air supply source to thereby form an air bearing between the vacuum suction plate and the base plate, whereby a gap and parallelism is maintained therebetween. Upon completion of positioning of the stage, the space is connected to the vacuum source so that the vacuum suction plate is locked onto the stationary base under the suction effect brought about by evacuation of the space.

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