Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate
2006-02-14
2006-02-14
Keenan, James W. (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
C414S940000
Reexamination Certificate
active
06997664
ABSTRACT:
The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system. Because the present invention adopts a modular design, the drive source of each unit is isolated and the circuit of each unit is hidden so that the whole structure is most compact and the assembling/disassembling and maintenance are easier.
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Chen Jiann-Cherng
Chen Kuan-Chou
Hu Ping-Yu
Huang Chun-Kai
Liang Muh-Wang
Industrial Technology Research Institute
Keenan James W.
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