Coating apparatus – Immersion or work-confined pool type – Rotating work about an axis through itself during coating
Patent
1992-06-11
1994-11-22
Wilczewski, Mary
Coating apparatus
Immersion or work-confined pool type
Rotating work about an axis through itself during coating
422254, 437125, C30B 1906, H01L 21208
Patent
active
053665520
ABSTRACT:
A method and an apparatus capable of efficiently producing an epitaxial layer grown at one time on a multiplicity of substrates with uniform thickness and quality are disclosed, in which a sealable growth chamber filled in a solution used to achieve liquid-phase epitaxial growth and holding therein at least one row of thin plate-like substrate is turned about the horizontal axis. The growth chamber is tilted or overturned so that the solution in the growth chamber is stirred homogeneously and the effect of gravity on the solution is excluded. A solution chamber for holding therein the solution is connected with the growth chamber via a gate valve. After the liquid-phase epitaxial growth, the growth chamber is overturned and then the gate valve is opened so that the solution in the growth chamber returns to the solution chamber. Thus, reuse of the solution is possible.
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Endo Masahisa
Takenaka Takao
Yamada Masato
Shin-Etsu Handotai & Co., Ltd.
Wilczewski Mary
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